ENMF529
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Introduction to Microelectromechanical Systems
Mechanical and Manufacturing Engineering
EN - Schulich School of Engineering
Subject
ENMF - Manufacturing Engineering
Description
Microelectromechanical systems (MEMS) and devices including microsensors and microactuators. Principles of operation, material properties, fabrication techniques including surface and bulk micromachining, IC-derived microfabrication techniques, sensing and actuation principles, sensor dynamics issues, circuit and system issues, packaging, calibration and testing. Illustrative examples include (1) micromachined inertial sensors and actuators for manufacturing processes, (2) microactuator arrays for \"smart surfaces\", (3) biosensors for medical applications, and (4) transducers for aerospace applications.
Antirequisite(s): Credit for Manufacturing Engineering 529 and Mechanical Engineering 519.16 or Manufacturing Engineering 619.01 will not be allowed.
Antirequisite(s): Credit for Manufacturing Engineering 529 and Mechanical Engineering 519.16 or Manufacturing Engineering 619.01 will not be allowed.
Course Attributes
Fee Rate Group(Domestic) - D, Fee Rate Group(International) -C, GFC Hours (3-2)
Courses may consist of a Lecture, Lab, Tutorial, and/or Seminar. Students will be required to register in each component that is required for the course as indicated in the schedule of classes. Practicums, internships or other experiential learning modalities are typically indicated as a Lab component.
Component
LAB
Component
LEC
Units
3
Repeat for Credit
No
Subject code
ENMF
Understanding Course Information
Please refer to Course Terminology and Description to better understand how to interpret course information such as GFC hours, prerequisites, course levels, etc.
Note that not all courses are offered every term or every year. Please refer to the Schedule of Classes or Schedule Builder to see active class offerings.